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Proceedings Paper

Virtual-phase charge-coupled device image sensors for industrial and scientific applications
Author(s): Alexander T. Khvilivitzky; V. Yu. Berezin; Leonid Yu. Lazovsky; S. S. Tataurschikov; A. N. Pisarevsky; Michail G. Vydrevitch; Vladimir G. Kossov
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Paper Abstract

A family of VP CCD image sensors for different industrial and scientific applications was designed, fabricated, and tested. All of them share the common concept of a 2.5-phase photosensitive cell, combining the advantages of known 1.5-phase VP devices (reduced dark current and increased quantum efficiency) with simpler fabrication process and extended functions.

Paper Details

Date Published: 1 July 1991
PDF: 7 pages
Proc. SPIE 1447, Charge-Coupled Devices and Solid State Optical Sensors II, (1 July 1991); doi: 10.1117/12.45339
Show Author Affiliations
Alexander T. Khvilivitzky, ISTA Ltd. (Russia)
V. Yu. Berezin, ISTA Ltd. (Russia)
Leonid Yu. Lazovsky, ISTA Ltd. (Russia)
S. S. Tataurschikov, Electron Research Insititute (Russia)
A. N. Pisarevsky, Electron Research Insititute (Russia)
Michail G. Vydrevitch, Electron Research Insititute (Russia)
Vladimir G. Kossov, Electron Research Insititute (Russia)


Published in SPIE Proceedings Vol. 1447:
Charge-Coupled Devices and Solid State Optical Sensors II
Morley M. Blouke, Editor(s)

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