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Proceedings Paper

Agile micromirrors with three degrees of freedom manufactured with liquid MEMS technology
Author(s): Alan D. Feinerman; Gary Friedman; Elina Kasman; Jonathan Montgomery; Pancham R. Patel; Constantine Megaridis; Eric Howell; Steven H. Collicott
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Paper Abstract

The Mesoscopic MEMS (MicroElectroMechanical Systems) technology developed at UIC allows the fabrication of structures not possible with conventional planar thin film patterning methods. These techniques enable the fabrication of an agile micro-mirror that can rapidly tip and tilt by large angles in two independent directions with a small footprint on the substrate. The mirrors can be electrostatically deflected, and rotate around a spherical pivot that is a drop of a conducting liquid. The drop can be forced to spread by applying a small voltage to an electrode surrounding the drop and this provides piston motion for the third degree of freedom. The drop is confined to a lithographically defined wetting area on the mirror and the substrate surfaces. The drop provides a surface tension restoring force to balance the electrostatic torque, as well as electrical and thermal conduction between the mirror and the substrate. The fabrication method uses aligned shadow masks to deposit electrodes on a non-planar substrate. The fabrication requires precision dispensing of approximately 10 pL liquid drops using inkjet printing technology.

Paper Details

Date Published: 22 January 2002
PDF: 11 pages
Proc. SPIE 4489, Free-Space Laser Communication and Laser Imaging, (22 January 2002); doi: 10.1117/12.453226
Show Author Affiliations
Alan D. Feinerman, Univ. of Illinois/Chicago (United States)
Gary Friedman, Univ. of Illinois/Chicago (United States)
Elina Kasman, Univ. of Illinois/Chicago (United States)
Jonathan Montgomery, Univ. of Illinois/Chicago (United States)
Pancham R. Patel, Univ. of Illinois/Chicago (United States)
Constantine Megaridis, Univ. of Illinois/Chicago (United States)
Eric Howell, Univ. of Illinois/Chicago (United States)
Steven H. Collicott, Purdue Univ. (United States)

Published in SPIE Proceedings Vol. 4489:
Free-Space Laser Communication and Laser Imaging
David G. Voelz; Jennifer C. Ricklin, Editor(s)

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