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Proceedings Paper

Megapixel CCD thinning/backside progress at SAIC
Author(s): A. Russell Schaefer; Richard H. Varian; John R. Cover; Robert G. Larsen
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Paper Details

Date Published: 1 July 1991
PDF: 12 pages
Proc. SPIE 1447, Charge-Coupled Devices and Solid State Optical Sensors II, (1 July 1991); doi: 10.1117/12.45322
Show Author Affiliations
A. Russell Schaefer, Science Applications International Corp. (United States)
Richard H. Varian, Science Applications International Corp. (United States)
John R. Cover, Science Applications International Corp. (United States)
Robert G. Larsen, Science Applications International Corp. (United States)


Published in SPIE Proceedings Vol. 1447:
Charge-Coupled Devices and Solid State Optical Sensors II
Morley M. Blouke, Editor(s)

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