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Proceedings Paper

Static spectroscopic ellipsometer based on optical frequency-domain interferometry
Author(s): Kazuhiko Oka; Takayuki Kato
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Paper Abstract

This paper describes a novel spectroscopic ellipsometer using no mechanical or active components for polarization modulation. A pair of fairly-thick birefringent retarders are incorporated into the ellipsometer so that the spectrally-resolved ellipsometric angles (Psi) and (Delta) can be determined at once from only the single channeled spectrum. Its effectiveness is demonstrated with SiO2 films deposited on Si substrates.

Paper Details

Date Published: 9 January 2002
PDF: 4 pages
Proc. SPIE 4481, Polarization Analysis and Measurement IV, (9 January 2002); doi: 10.1117/12.452883
Show Author Affiliations
Kazuhiko Oka, Hokkaido Univ. (Japan)
Takayuki Kato, Hokkaido Univ. (Japan)

Published in SPIE Proceedings Vol. 4481:
Polarization Analysis and Measurement IV
Dennis H. Goldstein; Walter G. Egan; David B. Chenault; Michael J. Duggin; Walter G. Egan; Michael J. Duggin, Editor(s)

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