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Proceedings Paper

Development of submicrometer resolution x-ray CT system at SPring-8
Author(s): Kentaro Uesugi; Yoshio Suzuki; Naoto Yagi; Akira Tsuchiyama; Tsukasa Nakano
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Paper Abstract

A high spatial resolution x-ray CT system was developed at SPrng-8. The experiments were performed at the in-vacuum type undulator beamline BL47XU. A Si (111) double crystal monochromator is cooled with liquid nitrogen. A high precision rotation stage was used for sample rotation stage. Transmitted images were measured with an image detector. As the results of performance tests, it is considered that the spatial resolution of at least 1 micrometers was achieved with this system. The three-dimensional textures of eutectic alloy and a fossil of diatom were observed with this system.

Paper Details

Date Published: 7 January 2002
PDF: 8 pages
Proc. SPIE 4503, Developments in X-Ray Tomography III, (7 January 2002); doi: 10.1117/12.452855
Show Author Affiliations
Kentaro Uesugi, SPring-8/JASRI (Japan)
Yoshio Suzuki, SPring-8/JASRI (Japan)
Naoto Yagi, SPring-8/JASRI (Japan)
Akira Tsuchiyama, Osaka Univ. (Japan)
Tsukasa Nakano, Geological Survey of Japan (Japan)

Published in SPIE Proceedings Vol. 4503:
Developments in X-Ray Tomography III
Ulrich Bonse, Editor(s)

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