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Proceedings Paper

Synthesis of ZnS:Sm thin films from volatile complex compounds
Author(s): Elena Nikolaevna Ivanova; Yu. A. Kovalevskaya; Valentin G. Bessreguenev
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Paper Abstract

Deposition and characterization of ZnS, Sm2S3 and ZnS:Sm films are described. The films have been prepared by chemical vapor deposition using new volatile complex compounds, dithiocarbamates of Zn and Sm, as precursors. Characterization includes X-ray diffraction, chemical analysis of the film composition, ellipsometry and spectrophotometry. It has been shown that at relatively low temperatures (about 380 °C) monophase crystalline Sm2S3 films can be fabricated. Doping of ZnS by Sm with dopant concentration up to 2 at. % has been achieved. Effects of Sm doping on structural and optical properties of the film are presented.

Paper Details

Date Published: 26 November 2002
PDF: 8 pages
Proc. SPIE 4776, Solid State Lighting II, (26 November 2002); doi: 10.1117/12.452564
Show Author Affiliations
Elena Nikolaevna Ivanova, Institute of Inorganic Chemistry (Russia)
Yu. A. Kovalevskaya, Institute of Inorganic Chemistry (Russia)
Valentin G. Bessreguenev, Institute of Inorganic Chemistry (Russia)


Published in SPIE Proceedings Vol. 4776:
Solid State Lighting II
Ian T. Ferguson; Nadarajah Narendran; Steven P. DenBaars; Yoon-Soo Park, Editor(s)

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