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In-situ biaxial texture analysis of MgO films during growth on amorphous substrates by ion-beam-assisted deposition
Author(s): Rhett Brewer; Paul N. Arendt; James R. Groves; Harry A. Atwater
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Paper Abstract

We used a kinematical electron scattering model to develop a RHEED based method for performing quantitative analysis of mosaic polycrystalline thin film in-plane and out-of-plain grain orientation distributions. RHEED based biaxial texture measurements are compared to x-ray and transmission electron microscopy measurements to establish the validity of the RHEED analysis method. MgO was grown on amorphous Si3N4 by ion beam-assisted deposition (IBAD) using 750 eV Ar+ ions and MgO e-beam evaporation. The ion/MgO flux ratio was varied between 0.66 and 0.42. In situ RHEED analysis reveals that during nucleation the out-of-plane orientation distribution is very broad (almost random), but narrows very quickly once well-oriented grains reach a critical size. Under optimal conditions a competition between selective sputtering and surface roughening yields a minimum out-of-plane texture at about 100 angstrom, which degrades with increasing film thickness. The narrowest in- plane orientation distribution (5.4 degrees FWHM) was found to be at an ion/MgO flux ratio between 0.55 and 0.51, in good agreement with previous experiments. The systematic offsets between RHEED analysis and x-ray measurements of biaxial texture, coupled with evidence that biaxial texture improves with increasing film thickness, indicates that RHEED is a superior technique for probing surface biaxial texture.

Paper Details

Date Published: 27 December 2001
PDF: 7 pages
Proc. SPIE 4468, Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing, (27 December 2001); doi: 10.1117/12.452547
Show Author Affiliations
Rhett Brewer, California Institute of Technology (United States)
Paul N. Arendt, Los Alamos National Labs. (United States)
James R. Groves, Los Alamos National Labs. (United States)
Harry A. Atwater, California Institute of Technology (United States)

Published in SPIE Proceedings Vol. 4468:
Engineering Thin Films with Ion Beams, Nanoscale Diagnostics, and Molecular Manufacturing
Emile J. Knystautas; Wiley P. Kirk; Valerie Browning, Editor(s)

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