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Proceedings Paper

High-order correlation from rough surface scattering
Author(s): Zu-Han Gu
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Paper Abstract

We proposal to apply two optical setups of a 1-D rough dielectric film on a glass substrate and a randomly weak dielectric film on a reflecting metal substrate for the measurement of high order correlation from rough surface scattering. The angular amplitude and intensity correlations are measured. Due to multiple scattering, when the input laser beam size is comparatively small or close to the travel pass length inside the film, C(2) and C(3) are measured by subtracting amplitude correlation from intensity correlation.

Paper Details

Date Published: 22 October 2002
PDF: 9 pages
Proc. SPIE 4780, Surface Scattering and Diffraction for Advanced Metrology II, (22 October 2002); doi: 10.1117/12.452320
Show Author Affiliations
Zu-Han Gu, Surface Optics Corp. (United States)


Published in SPIE Proceedings Vol. 4780:
Surface Scattering and Diffraction for Advanced Metrology II
Zu-Han Gu; Alexei A. Maradudin, Editor(s)

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