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Proceedings Paper

Sol-gel-derived barium strontium titanate thin films for uncooled infrared detector array applications
Author(s): Jian-Gong Cheng; Jun Tang; Junhao Chu
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Paper Abstract

Columnar Ba0.8Sr0.2TiO3 films with a grain size of 100 to 200 nm have been obtained from a 0.05M precursor solution. Electrical measurements indicated these films showed a pyroelectric coefficient of 4.1 × 10-4 C/m2K at room temperature, and a leakage current of 1.42 × 10-7 A/cm2 under 100 kV/cm electrical field. The Ba0.8Sr0.2TiO3 films have been used for fabricating a 1 × 16 elements infrared detector linear array with a bulk micromachining technique. The array pixels with a sensitive area of 500 × 300 μm2 have a detectivity of 2.3 × 108 cmHz½W-1 at 23°C and 35 Hz. By using these infrared detector arrays, thermal images were successfully obtained at room temperature. These results indicate the sol-gel derived Ba0.8Sr0.2TiO3 films from a 0.05M precursor solution are suitable for uncooled infrared detector array applications.

Paper Details

Date Published: 5 December 2002
PDF: 7 pages
Proc. SPIE 4795, Materials for Infrared Detectors II, (5 December 2002); doi: 10.1117/12.451911
Show Author Affiliations
Jian-Gong Cheng, Siemens AG (Germany)
Shanghai Institute of Technical Physics (China)
Shandong Univ. (China)
Jun Tang, Shanghai Institute of Technical Physics (China)
Junhao Chu, Shanghai Institute of Technical Physics (China)

Published in SPIE Proceedings Vol. 4795:
Materials for Infrared Detectors II
Randolph E. Longshore; Sivalingam Sivananthan, Editor(s)

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