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Proceedings Paper

Analysis of experimental reflection spectra from diffraction gratings using the Rayleigh theory and a rigorous method
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Paper Abstract

We obtain the reflection spectra of p-polarized light from metallic gratings fabricated by means of the interference technique. The gratings have constant period and heights are varied by changing the exposure time of the interference pattern on the sample. The experimental spectra show two minima due to the excitation of surface plasmons, and they are compared with the corresponding numerical results obtained with two models, the Rayleigh theory and the rigorous integral method. In order to demonstrate the validity of the Rayleigh hypothesis the amplitudes of the gratings are chosen close to the Rayleigh limit.

Paper Details

Date Published: 22 October 2002
PDF: 8 pages
Proc. SPIE 4780, Surface Scattering and Diffraction for Advanced Metrology II, (22 October 2002); doi: 10.1117/12.451833
Show Author Affiliations
Raul Garcia-Llamas, Univ. de Sonora (Mexico)
J. Felix Aguilar, Instituto Nacional de Astrofisica Optica y Electronica (Mexico)

Published in SPIE Proceedings Vol. 4780:
Surface Scattering and Diffraction for Advanced Metrology II
Zu-Han Gu; Alexei A. Maradudin, Editor(s)

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