Share Email Print
cover

Proceedings Paper

Performance limits of ARS sensor based on CMOS photodiode array
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Measuring the light scatter back from a coherently illuminated surface is a powerful and fast measurement method to observe surfaces and its properties. It opens the possibility to measure integral surface topography constants, material properties, surface defects and contamination. In this paper the performance limits of the angle resolved light scatter sensor (ARS sensor) LARISSA (Large Dynamic Range Intelligent Scatter Sensor Approach) will be discussed and exemplified by using a technical application. In the first part of the paper the experimental setup of the ARS sensor LARISSA will be considered. In the second part of the paper the performance limitation of the ARS sensor LARISSA concerning particle detection will be derived based on simulation and measurement results. Finally a short overview is given about further development of the ARS sensor.

Paper Details

Date Published: 11 November 2002
PDF: 11 pages
Proc. SPIE 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, (11 November 2002); doi: 10.1117/12.451738
Show Author Affiliations
Thomas Rinder, Univ. of the Federal Armed Forces (Germany)
Hendrik Rothe, Univ. of the Federal Armed Forces (Germany)


Published in SPIE Proceedings Vol. 4779:
Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components
Angela Duparré; Bhanwar Singh, Editor(s)

© SPIE. Terms of Use
Back to Top