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Proceedings Paper

Design and Implementation of a rotationally symmetric ellipsometer
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Paper Abstract

We report a unique scanning microellipsometer using a high numerical aperture lens to provide large-angle ellipsometric illumination and high spatial resolution. This microellipsometer is equivalent to a multi-channel rotating analyzer ellipsometer obeying rotational symmetry. The symmetry is realized by using a circularly polarized incident beam, a variable circular retarder and a rotational analyzer. This rotational symmetry offers better signal-to-noise ratio compared with the other microellipsometer techniques. Scanning ellipsometric measurement of surface relief with spatial resolution of 0.5 μm is performed with a NA of 0.8 illumination by use of a He-Ne laser source.

Paper Details

Date Published: 11 November 2002
PDF: 7 pages
Proc. SPIE 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, (11 November 2002); doi: 10.1117/12.451710
Show Author Affiliations
Qiwen Zhan, Univ. of Minnesota/Twin Cities (United States)
James R. Leger, Univ. of Minnesota/Twin Cities (United States)


Published in SPIE Proceedings Vol. 4779:
Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components
Angela Duparré; Bhanwar Singh, Editor(s)

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