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Proceedings Paper

Surface damage metrology: precision at low cost
Author(s): Lionel R. Baker
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Paper Abstract

This paper reviews the current status of methods for the inspection and measurement of damage, such as digs and scratches on high quality surfaces and reports on relevant ISO standards. A simple but precise low-cost approach for measuring imperfections and contamination on and within an optical system using a digital camera is described.

Paper Details

Date Published: 11 November 2002
PDF: 11 pages
Proc. SPIE 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, (11 November 2002); doi: 10.1117/12.451708
Show Author Affiliations
Lionel R. Baker, L.B. Consultants (United Kingdom)


Published in SPIE Proceedings Vol. 4779:
Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components
Angela Duparré; Bhanwar Singh, Editor(s)

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