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Proceedings Paper

Development of EUV point diffraction interferometry using the NewSUBARU undulator radiation
Author(s): Masahito Niibe; Mikihito Mukai; Takeshi Tanaka; Katsumi Sugisaki; Yucong Zhu; Yoshio Gomei
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Paper Abstract

An extreme ultra-violet phase-shifting point diffraction interferometer (PS/PDI) was studied by using the NewSUBARU[1] undulator radiation. The beam line was equipped with a monochromator for PDI measurement. To improve the converging performance of the undulator radiation, a new beam line suitable for PDI was designed. From the examination of monochromaticity required for PDI, the 0th-order light of the monochromator was used in the experiment. The higher-order radiation of the undulator was eliminated by the reflection band of the Mo/Si multilayer mirrors. By means of improvements of the pre-alignment method and of the mask structure, a higher contrast than ever was achieved in the interference fringes.

Paper Details

Date Published: 24 December 2002
PDF: 8 pages
Proc. SPIE 4782, X-Ray Mirrors, Crystals, and Multilayers II, (24 December 2002); doi: 10.1117/12.451354
Show Author Affiliations
Masahito Niibe, Himeji Institute of Technology (Japan)
Mikihito Mukai, Himeji Institute of Technology (Japan)
Takeshi Tanaka, Himeji Institute of Technology (Japan)
Katsumi Sugisaki, Association of Super-Advanced Electronics Technologies (Japan)
Yucong Zhu, Association of Super-Advanced Electronics Technologies (Japan)
Yoshio Gomei, Association of Super-Advanced Electronics Technologies (Japan)

Published in SPIE Proceedings Vol. 4782:
X-Ray Mirrors, Crystals, and Multilayers II
Andreas K. Freund; Albert T. Macrander; Tetsuya Ishikawa; James L. Wood, Editor(s)

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