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Proceedings Paper

Infrared microanalysis of contaminants at grazing incidence
Author(s): John A. Reffner
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Paper Abstract

A new objective lens for grazing angle FT-IR microscopy provides a means for the infrared analysis of monomolecular films in small (25 X 25 micrometers ) areas. Conventional grazing incidence reflection spectroscopy is an established technology for detecting and analyzing thin surface films on metals or highly reflecting materials. The grazing incidence objective extends these techniques to microscopic areas. Applications of grazing angle FT-IR microscopy (GAM) are illustrated by exemplar analyses. The analyses of thin film lubricants and contaminants are specially important.

Paper Details

Date Published: 1 April 1991
PDF: 6 pages
Proc. SPIE 1437, Applied Spectroscopy in Material Science, (1 April 1991); doi: 10.1117/12.45135
Show Author Affiliations
John A. Reffner, Spectra-Tech Inc. (United States)


Published in SPIE Proceedings Vol. 1437:
Applied Spectroscopy in Material Science
David D. Saperstein, Editor(s)

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