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Proceedings Paper

Integrating FTIR microscopy into surface analysis
Author(s): Jeffrey S. Church
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Paper Abstract

The chemical information obtained from a sample by the techniques of Fourier Transform Infrared (FTIR) microscopy and small spot Electron Spectroscopy for Chemical Analysis (ESCA) can be very complementary. The basics of both of these analytical techniques will be discussed and case studies showing how the data from these techniques can be combined to provide a powerful tool for industrial problem solving and materials characterization, will be presented.

Paper Details

Date Published: 1 April 1991
PDF: 9 pages
Proc. SPIE 1437, Applied Spectroscopy in Material Science, (1 April 1991); doi: 10.1117/12.45134
Show Author Affiliations
Jeffrey S. Church, Scanning Electron Analysis Labs., Inc. (United States)


Published in SPIE Proceedings Vol. 1437:
Applied Spectroscopy in Material Science
David D. Saperstein, Editor(s)

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