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Proceedings Paper

Influence of aberrations on the image quality of subtle periodic structures in case of high entrance numerical apertures
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Paper Abstract

The numerical modeling of influence of aberrations on pictur quality of thin periodic structures with taking into account a high entrance numerical aperture (NA) on the basis of the vector theory of diffraction is presented. The simulation algorithm and brief theoretical considerations are discussed. It is shown the influence of the entrance NA on image quality of microscope objectives is different for various values of NA and the contrast increases with the higher entrance NA.

Paper Details

Date Published: 21 December 2001
PDF: 9 pages
Proc. SPIE 4436, Wave-Optical Systems Engineering, (21 December 2001); doi: 10.1117/12.451304
Show Author Affiliations
Alexander V. Belozubov, St. Petersburg Institute of Fine Mechanics and Optics (Russia)

Published in SPIE Proceedings Vol. 4436:
Wave-Optical Systems Engineering
Frank Wyrowski, Editor(s)

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