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Proceedings Paper

Optical properties of ZnSe diffractive optical elements for spot array generation
Author(s): Keiji Ebata; Keiji Fuse; Kenichi Kurisu; Takeshi Okada; Takayuki Hirai; Hirokuni Nanba
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Paper Abstract

We have developed a new design of advanced optics for processing high-power laser material. We introduce the concept of DOE (Diffractive Optical Elements) for high power CO2 lasers ((lambda) =10.6micrometers ). The superior functionality of DOE means that it could become the new standard in optics for next generation devices. Here we describe the design of our DOE technology using scalar theory and micro fabrication using photolithography and RIE (Reactive Ion Etching). We also present results of our ZnSe-DOE technology, mainly focusing on a novel spot-array generator.

Paper Details

Date Published: 21 December 2001
PDF: 11 pages
Proc. SPIE 4436, Wave-Optical Systems Engineering, (21 December 2001); doi: 10.1117/12.451294
Show Author Affiliations
Keiji Ebata, Sumitomo Electric Industries, Ltd. (Japan)
Keiji Fuse, Sumitomo Electric Industries, Ltd. (Japan)
Kenichi Kurisu, Sumitomo Electric Industries, Ltd. (Japan)
Takeshi Okada, Sumitomo Electric Industries, Ltd. (Japan)
Takayuki Hirai, Sumitomo Electric Industries, Ltd. (Japan)
Hirokuni Nanba, Sumitomo Electric Industries, Ltd. (Japan)

Published in SPIE Proceedings Vol. 4436:
Wave-Optical Systems Engineering
Frank Wyrowski, Editor(s)

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