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Proceedings Paper

X-ray lenses fabricated by deep x-ray lithography
Author(s): Derrick C. Mancini; Nicolaie A. Moldovan; Ralu Divan; Francesco DeCarlo; Judith Yaeger
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Paper Abstract

Refractive x-ray lenses have been fabricated using deep x-ray lithography. Lenses were produced directly in 1- to 6-mm-thick sheets of polymethylmethacrylate (PMMA) with as many as 100 cylindrical lenses along the optical axis. The fabrication process consists of exposing the PMMA sheets to high-energy synchrotron radiation through a mask of 50-micron-thick gold on silicon, and subsequent development in ketone. The lenses are suitable for use in synchrotron radiation from a bending magnet at the Advanced Photon Source in the energy range of 8-16 KeV. Results of measurements of focus quality, flux density gain, and scatter are presented and discussed with regard to the quality of lens material and fabrication method. Means for improving the performance of the lenses is discussed.

Paper Details

Date Published: 21 November 2002
PDF: 9 pages
Proc. SPIE 4783, Design and Microfabrication of Novel X-Ray Optics, (21 November 2002); doi: 10.1117/12.451021
Show Author Affiliations
Derrick C. Mancini, Argonne National Lab. (United States)
Nicolaie A. Moldovan, Argonne National Lab. (United States)
Ralu Divan, Argonne National Lab. (United States)
Francesco DeCarlo, Argonne National Lab. (United States)
Judith Yaeger, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 4783:
Design and Microfabrication of Novel X-Ray Optics
Derrick C. Mancini, Editor(s)

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