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Proceedings Paper

Focused two-dimensional antiscatter grid for mammography
Author(s): Olga V. Makarova; Nicolai A. Moldovan; Cha-Mei Tang; Derrick C. Mancini; Ralu Divan; Vladislav N. Zyryanov; David G. Ryding; Judith Yaeger; Chian Liu
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Paper Abstract

We are developing freestanding high-aspect-ratio, focused, two-dimensional antiscatter grids for mammography using deep x-ray lithography and copper electroforming. The exposure is performed using x-rays from bending magnet beamline 2-BM at the Advanced Photon Source (APS) of Argonne National Laboratory. A 2.8-mm-thick prototype freestanding copper antiscatter grid with 25μm-wide parallel cell walls and 550 μm periodicity has been fabricated. The progress in developing a dynamic double-exposure technique to create the grid with the cell walls aligned to a point x-ray source of the mammography system is discussed.

Paper Details

Date Published: 21 November 2002
PDF: 8 pages
Proc. SPIE 4783, Design and Microfabrication of Novel X-Ray Optics, (21 November 2002); doi: 10.1117/12.451018
Show Author Affiliations
Olga V. Makarova, Creatv MicroTech, Inc. (United States)
Nicolai A. Moldovan, Argonne National Lab. (United States)
Cha-Mei Tang, Creatv MicroTech, Inc. (United States)
Derrick C. Mancini, Argonne National Lab. (United States)
Ralu Divan, Argonne National Lab. (United States)
Vladislav N. Zyryanov, Creatv MicroTech, Inc. (United States)
David G. Ryding, Argonne National Lab. (United States)
Judith Yaeger, Argonne National Lab. (United States)
Chian Liu, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 4783:
Design and Microfabrication of Novel X-Ray Optics
Derrick C. Mancini, Editor(s)

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