Share Email Print
cover

Proceedings Paper

EUV-emission of xenon clusters excited by a high-repetition-rate burst-mode laser
Author(s): Holger Stiel; Ulrich Vogt; Sargis Ter-Avetisyan; Matthias Schnurer; Ingo Will; Peter Viktor Nickles
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In this contribution we describe a laser plasma source for Extreme Ultraviolet Lithography (EUVL) based on a Xe-cluster target. Although Xe-clusters as target systems for EUVL are known for some time, no attempts have been made for a systematic study of the influence of the laser parameters on the EUV-emission at a well defined Xe-aggregation. The MBI burst mode laser used offers some unique features: Within one burst (duration 800 μs) the repetition rate of single laser pulses can be adjusted between 30 and 1000 kHz. The average power per burst is about 5 kW at the maximum energy of 4 J/burst. The pulse duration of a single pulse can be adjusted from the ps- to ns-range. We have examined the EUV-emission from the Xe-cluster target within one burst of the laser as a function of single pulse intensity and repetition rate. Based on the measured EUV-spectra the conversion efficiency at 13.4 nm wavelength in dependence on pulse duration in the range from 30 ps to 3 ns were estimated.

Paper Details

Date Published: 23 October 2002
PDF: 9 pages
Proc. SPIE 4781, Advances in Laboratory-Based X-Ray Sources and Optics III, (23 October 2002); doi: 10.1117/12.450965
Show Author Affiliations
Holger Stiel, Max-Born-Institute for Nonlinear Optics and Short Pulse Spectroscopy (Germany)
Ulrich Vogt, Max-Born-Institute for Nonlinear Optics and Short Pulse Spectroscopy (Germany)
Sargis Ter-Avetisyan, Institute for Physical Research (Armenia)
Matthias Schnurer, Max-Born-Institute for Nonlinear Optics and Short Pulse Spectroscopy (Germany)
Ingo Will, Max-Born-Institute for Nonlinear Optics and Short Pulse Spectroscopy (Germany)
Peter Viktor Nickles, Max-Born-Institute for Nonlinear Optics and Short Pulse Spectroscopy (Germany)


Published in SPIE Proceedings Vol. 4781:
Advances in Laboratory-Based X-Ray Sources and Optics III
Ali M. Khounsary; Carolyn A. MacDonald, Editor(s)

© SPIE. Terms of Use
Back to Top