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Proceedings Paper

Current status of ASET-HIT EUV phase-shifting point diffraction interferometer
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Paper Abstract

Extreme-ultraviolet phase-shifting point diffraction interferometer (PS/PDI) was studied by using the NewSUBARU undulator radiation. The wave-front error of a Schwarzchild test optics was measured. Since this is a common path PDI technique, optics pre-alignment is very important to receive enough power at the second pinhole. We carried out this pre-alignment by using the same common path PS/PDI system but by using a He-Ne laser. A temporal wave-front error attained by pre-alignment was 4.4 nm rms. We then studied band width requirement to carry out this PS/PDI in EUV. We found that the wavelength ((lambda) ) dependency of grating diffraction angle plays an important role in phase matching at the CCD camera location, although significant optical path difference exists at the edge of the fringe field. A 1 micrometers square double window experiment was carried out with (lambda) /(Delta) (lambda) is congruent to 30, and straight fringes were observed throughout the CCD field. A PDI experiment using larger pinholes compared with nominal sizes was also conducted, and various factors, which were posed onto the experimental results, were investigated.

Paper Details

Date Published: 20 December 2001
PDF: 7 pages
Proc. SPIE 4506, Soft X-Ray and EUV Imaging Systems II, (20 December 2001); doi: 10.1117/12.450962
Show Author Affiliations
Yoshio Gomei, Association of Super-Advanced Electronics Technology (Japan)
Katsumi Sugisaki, Association of Super-Advanced Electronics Technology (Japan)
Yucong Zhu, Association of Super-Advanced Electronics Technology (Japan)
Masahito Niibe, Himeji Institute of Technology (Japan)
Takeo Watanabe, Himeji Institute of Technology (Japan)
Hiroo Kinoshita, Himeji Institute of Technology (Japan)


Published in SPIE Proceedings Vol. 4506:
Soft X-Ray and EUV Imaging Systems II
Daniel A. Tichenor; James A. Folta, Editor(s)

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