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Proceedings Paper

Design and progress in the fabrication of an EUV micro exposure tool optics for PREUVE
Author(s): Roland Geyl; Jean-Francois Tanne
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Paper Abstract

SAGEM, through its REOSC product line, is participating since November 1999 to PREUVE, the French EUV initiative, and work within this program especially in the field of EUV illumination and projection optics. After a short description of the PREUVE main lines of activity, we will detail our contributions to this program and work progress. This is mainly focused on basic EUV optics fabrication technology in order to ensure the fabrication of the entire optics assembly of an EUV micro exposure tool.

Paper Details

Date Published: 20 December 2001
PDF: 6 pages
Proc. SPIE 4506, Soft X-Ray and EUV Imaging Systems II, (20 December 2001); doi: 10.1117/12.450959
Show Author Affiliations
Roland Geyl, SAGEM (France)
Jean-Francois Tanne, SAGEM (France)


Published in SPIE Proceedings Vol. 4506:
Soft X-Ray and EUV Imaging Systems II
Daniel A. Tichenor; James A. Folta, Editor(s)

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