Proceedings Paper
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Paper Abstract
This paper is about the beam divergences of polycapillary optics. The definitions and measurement methods of polycapillary optics beam local divergence and global divergence are given. Factors like source spot size, optic input focal distance etc. for determining the beam local divergences are analyzed. Some simulation and experimental results for the polycapillary optics, which are used for X-ray diffraction and X-ray lithography, will also be presented.
Paper Details
Date Published: 23 October 2002
PDF: 7 pages
Proc. SPIE 4781, Advances in Laboratory-Based X-Ray Sources and Optics III, (23 October 2002); doi: 10.1117/12.450606
Published in SPIE Proceedings Vol. 4781:
Advances in Laboratory-Based X-Ray Sources and Optics III
Ali M. Khounsary; Carolyn A. MacDonald, Editor(s)
PDF: 7 pages
Proc. SPIE 4781, Advances in Laboratory-Based X-Ray Sources and Optics III, (23 October 2002); doi: 10.1117/12.450606
Show Author Affiliations
Huapeng Huang, X-Ray Optical Systems, Inc. (United States)
Walter M. Gibson, X-Ray Optical Systems, Inc. (United States)
Walter M. Gibson, X-Ray Optical Systems, Inc. (United States)
Igor Yu. Ponomarev, X-Ray Optical Systems, Inc. (United States)
Russell Youngman, X-Ray Optical Systems, Inc. (United States)
Russell Youngman, X-Ray Optical Systems, Inc. (United States)
Published in SPIE Proceedings Vol. 4781:
Advances in Laboratory-Based X-Ray Sources and Optics III
Ali M. Khounsary; Carolyn A. MacDonald, Editor(s)
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