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Proceedings Paper

High-efficiency low-absorption Fresnel compound zone plates for hard x-ray focusing
Author(s): Armen Kuyumchyan; A. A. Isoyan; E. V. Shulakov; Vitaly V. Aristov; M Kondratenkov; Anatoly A. Snigirev; Irina Snigireva; Alexei Souvorov; Kenji Tamasaku; Makina Yabashi; Tetsuya Ishikawa; K Trouni
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Paper Abstract

Circular and linear zone plates have been fabricated on the surface of silicon crystals for the energy of 8 keV by electron beam lithography and deep ion plasma etching methods. Various variants of compound zone plates with first, second, third diffraction orders have been made. The zone relief height is about 10 mkm, the outermost zone width of the zone plate is 0.4 mkm. The experimental testing of the zone plates has been conducted on SPring-8 and ESRF synchrotron radiation sources. A focused spot size and diffraction efficiency measured by knife-edge scanning are accordingly 0.5 mkm and 39% for the first order circular zone plate.

Paper Details

Date Published: 21 November 2002
PDF: 5 pages
Proc. SPIE 4783, Design and Microfabrication of Novel X-Ray Optics, (21 November 2002); doi: 10.1117/12.450480
Show Author Affiliations
Armen Kuyumchyan, Institute of Microelectronics Technology (Russia)
A. A. Isoyan, Institute of Microelectronics Technology (Russia)
E. V. Shulakov, Institute of Microelectronics Technology (Russia)
Vitaly V. Aristov, Institute of Microelectronics Technology (Russia)
M Kondratenkov, Institute of Microelectronics Technology (Russia)
Anatoly A. Snigirev, European Synchrotron Radiation Facility (France)
Irina Snigireva, European Synchrotron Radiation Facility (France)
Alexei Souvorov, SPring-8/JASRI (Japan)
Kenji Tamasaku, SPring-8/JASRI (Japan)
Makina Yabashi, SPring-8/JASRI (Japan)
Tetsuya Ishikawa, Spring-8/JASRI (Japan)
K Trouni, International Academy of Science and Technology (United States)

Published in SPIE Proceedings Vol. 4783:
Design and Microfabrication of Novel X-Ray Optics
Derrick C. Mancini, Editor(s)

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