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Proceedings Paper

Recent progress in hybrid glass materials for micro-optical component fabrication
Author(s): Ari H. O. Karkkainen; Jeremy D. Rogers; Ghassan E. Jabbour; Juha T. Rantala; Michael R. Descour
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Paper Abstract

Hybrid glass materials are used in the photolithographic fabrication of optical and opto-mechanical structures. Two different methods are introduced. The first one is referred as photolithographic patterning and the other as direct photolithographic deforming of hybrid glass materials. Fabrication of isolated lenslets, lens arrays, gratings and other binary structures is presented. The hybrid glass material used in the photolithographic patterning features a maximum spectral extinction coefficient of 2.0 X 10-4 micrometers -1 between 450 nm and 1,600 nm and a refractive index of 1.53 at 632.8 nm. The fabricated structures feature large convex lens sags (up to 100 microns) with rms surface roughness values ranging from 10 to 45 nm, when the photolithographic patterning is applied. The hybrid glass material used in the direct photolithographic deforming exhibits a maximum spectral extinction coefficient of 1.6 X 10-3 micrometers -1 at wavelengths ranging from 450 nm to 2200 nm and a refractive index of 1.52 at 632.8 nm. The fabricated structures exhibit rms surface roughness between 1 and 5 nm, when direct photolithographic deforming is applied. These materials and methods are highly promising for micro- optics fabrication.

Paper Details

Date Published: 13 December 2001
PDF: 8 pages
Proc. SPIE 4455, Micro- and Nano-optics for Optical Interconnection and Information Processing, (13 December 2001); doi: 10.1117/12.450449
Show Author Affiliations
Ari H. O. Karkkainen, VTT Electronics and Optical Sciences Ctr./Univ. of Arizona (Finland)
Jeremy D. Rogers, Optical Sciences Ctr./Univ. of Arizona (United States)
Ghassan E. Jabbour, Optical Sciences Ctr./Univ. of Arizona (United States)
Juha T. Rantala, GuideOptics Oy (Finland)
Michael R. Descour, Optical Sciences Ctr./Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 4455:
Micro- and Nano-optics for Optical Interconnection and Information Processing
Mohammad R. Taghizadeh; Hugo Thienpont; Ghassan E. Jabbour, Editor(s)

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