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Proceedings Paper

PSF measurement of imaging detectors with an x-ray microbeam
Author(s): Hidekazu Takano; Yoshio Suzuki; Kentaro Uesugi; Akihisa Takeuchi; Naoto Yagi
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Paper Abstract

Point spread functions (PSF) of some kinds of x-ray imaging detectors are directly measured using x-ray microbeam. The experiment has been performed at bending magnet beamline BL20B2 and undulator beamline BL2oXU of Spring-9. The microbeam is focused using a Fresnel zone plate (FZP) with coherent illumination to 0.3micrometers (almost outermost zone width of the FZP). The imaging detectors are put at the focal plane and directly detect the microbeam. Two types of high spatial resolving detectors are tested. One is x-ray- electron conversion type with electro-magnetic lens, and spatial resolution is estimated to 0.7micrometers . The other is x-ray-visible light conversion type with optical lens and the spatial resolution is estimated to 1.0micrometers .

Paper Details

Date Published: 13 December 2001
PDF: 8 pages
Proc. SPIE 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II, (13 December 2001); doi: 10.1117/12.450230
Show Author Affiliations
Hidekazu Takano, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)
Yoshio Suzuki, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)
Kentaro Uesugi, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)
Akihisa Takeuchi, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)
Naoto Yagi, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)


Published in SPIE Proceedings Vol. 4499:
X-Ray Micro- and Nano-Focusing: Applications and Techniques II
Ian McNulty, Editor(s)

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