Share Email Print
cover

Proceedings Paper

X-ray imaging microscope with a partial coherent illumination
Author(s): Akihisa Takeuchi; Hidekazu Takano; Kentaro Uesugi; Yoshio Suzuki
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

An x-ray imaging microscopy experiment was performed at the x-ray energy of 8 keV. A Fresnel zone plate (FZP) fabricated by electron-beam lithography technique was used as an objective. Material of the zone structure is tantalum. The experiment was done at the undulator beamline BL47XU of Spring-8. Undulator radiation was monochromatized by passing through a liquid nitrogen cooled Si 111 double crystal monochromator. In order to eliminate speckle-like background noise, a partial coherent illumination was introduced by using a beam diffuser consisted of graphite powder. Beam spread of the illumination with the diffuser was about 35 (mu) rad. A charge coupled device (CCD) camera coupled with a phosphor screen and a microscope objective (x 12 or x 24) was used as an image detector. Converted pixel size with the x 24 lens was 0.5micrometers . Magnification of the x-ray microscope system was set to be 7.61-13. Pitch of 0.6micrometers (0.3 micrometers line and 0.3micrometers space) pattern of the test chart was resolved, and the outermost zone structure of the same type of FZP was observed. Imaging properties are also discussed by using Hopkins optical imaging theory.

Paper Details

Date Published: 13 December 2001
PDF: 9 pages
Proc. SPIE 4499, X-Ray Micro- and Nano-Focusing: Applications and Techniques II, (13 December 2001); doi: 10.1117/12.450219
Show Author Affiliations
Akihisa Takeuchi, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)
Hidekazu Takano, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)
Kentaro Uesugi, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)
Yoshio Suzuki, Japan Synchrotron Radiation Research Institute/SPring-8 (Japan)


Published in SPIE Proceedings Vol. 4499:
X-Ray Micro- and Nano-Focusing: Applications and Techniques II
Ian McNulty, Editor(s)

© SPIE. Terms of Use
Back to Top