The field of microtechnology is an important industrial and scientific resource for the 21st century. There is a great interest in spectroscopic sensors in the near and middle infrared (NIR-MIR) wavelength regions (1 - 2.5 micrometers ; 2.5 - 4.5 micrometers ; 4 - 6 micrometers ). The potential for cheap and small devices for nondestructive, remote sensing techniques at a molecular level has stimulated the design and development of more compact analyzer systems. Therefore we will try to build analyzers using micro optical components such as micromirrors and embossed micro gratings optimized for the above mentioned spectral ranges. Potentially, infrared sensors can be used for rapid nondestructive diagnostics of surfaces, liquids, gases, polymers and complex biological systems including proteins, blood, cells and cellular debris as well as body tissue. Furthermore, NIR-MIR microsensing spectroscopy will be utilized to monitor the chemical composition of petrochemical products like gasoline and diesel. In addition, miniature analyzers will be used for rapid measuring of food, in particular oil, starch and meat. In this paper we will present an overview of several new approaches for subsurface and surface sensing technologies based on the integration of optical micro devices, the most promising sensors for biomedical, environmental and industrial applications, data processing and evaluation algorithms for classification of the results. Both scientific and industrial applications will be discussed.

Date Published: 27 November 2001
PDF: 9 pages
Proc. SPIE 4491, Subsurface and Surface Sensing Technologies and Applications III, (27 November 2001); doi: 10.1117/12.450166

Published in SPIE Proceedings Vol. 4491:
Subsurface and Surface Sensing Technologies and Applications III
Cam Nguyen, Editor(s)