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Proceedings Paper

Polarized light scattering from metallic particles on silicon wafers
Author(s): Jung Hyeun Kim; Sheryl H. Ehrman; George W. Mulholland; Thomas A. Germer
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Paper Abstract

Polarized light scattering by monodisperse copper and gold spheres, having diameters ranging from 96 nm to 205 nm, deposited on silicon substrates were measured using visible light. The results are compared to an exact theory for scattering by a sphere on a surface, originally developed by Bobbert and Vlieger. The results show that accurate calculation of the scattering of light by a metal sphere requires that the near-field interaction between the sphere and its image be included in a complete manner, that the normal incidence approximation does not suffice for this interaction, and that the existence of any thin oxide layer on the substrate must be included. The polarization of light scattered by these spheres on silicon substrates can be used to determine the size of those spheres. However, uncertainties in the thickness of the substrate oxide layer, roughness of the particles, and uncertainties in the optical properties of the particles may prevent them from being used as standard scatterers. The implementation of the theory, which requires special care when the spheres are metallic and the substrate is highly reflecting, is described in detail.

Paper Details

Date Published: 10 December 2001
PDF: 10 pages
Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); doi: 10.1117/12.450105
Show Author Affiliations
Jung Hyeun Kim, National Institute of Standards and Technology and Univ. of Maryland/College Park (United States)
Sheryl H. Ehrman, Univ. of Maryland/College Park (United States)
George W. Mulholland, National Institute of Standards and Technology (United States)
Thomas A. Germer, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 4449:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
Angela Duparre; Bhanwar Singh, Editor(s)

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