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Proceedings Paper

Quasi-confocal extended field surface sensing
Author(s): Joseph Cohen-Sabban; Jerome Gaillard-Groleas; Pierre-Jean Crepin
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Paper Abstract

A novel optoelectronic setup based on a quasi confocal, z- axis extended field, proprietary design has been developed for High Resolution Non Contact 3D Surface Metrology including roughness characterization and surface flaw detection.

Paper Details

Date Published: 10 December 2001
PDF: 6 pages
Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); doi: 10.1117/12.450093
Show Author Affiliations
Joseph Cohen-Sabban, STIL SA (France)
Jerome Gaillard-Groleas, STIL SA (France)
Pierre-Jean Crepin, STIL SA (France)


Published in SPIE Proceedings Vol. 4449:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
Angela Duparre; Bhanwar Singh, Editor(s)

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