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Proceedings Paper

Rapid Confocal Sensor: a noncontact profilometer for fast 3D submicron inspection and metrology of large formats
Author(s): David Vaughnn; Cory Watkins; Dick Anderson
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Paper Abstract

The Rapid Confocal Sensor delivers sub-micron depth and five-micron lateral resolutions over a 300-mm format. With some a priori knowledge of a sample, an analysis over the 300-mm field is completed in approximately 7 minutes. An overview of the optical system (sensor) is given. Application of this technology is made to rapid 3D process inspection of semiconductor samples, particularly die contact bumps. Results demonstrating performance from a commercially available system are presented.

Paper Details

Date Published: 10 December 2001
PDF: 9 pages
Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); doi: 10.1117/12.450092
Show Author Affiliations
David Vaughnn, August Technology Corp. (United States)
Cory Watkins, August Technology Corp. (United States)
Dick Anderson, August Technology Corp. (United States)


Published in SPIE Proceedings Vol. 4449:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
Angela Duparre; Bhanwar Singh, Editor(s)

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