Share Email Print
cover

Proceedings Paper

Effects of particle shape on particle identification and scatter predictions
Author(s): Vladimir I. Ivakhnenko; John C. Stover; Craig A. Scheer; Yuri A. Eremin
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Laser particle scanners are traditionally calibrated with polystyrene latex spheres, and these spheres are used to create a sizing scale in light scatter equivalents. Particle scatter signals can vary strongly with particle materials, thus concealing the true particle size. As previously reported, particle material identification in a laser scanner will allow true sizing of spherical particles through the application of accurate scatter models. This paper reports extending that work to non-spherical particles through the use of modeling scatter from ellipsoidal particles.

Paper Details

Date Published: 10 December 2001
PDF: 7 pages
Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); doi: 10.1117/12.450087
Show Author Affiliations
Vladimir I. Ivakhnenko, ADE Corp. (United States)
John C. Stover, ADE Corp. (United States)
Craig A. Scheer, ADE Corp. (United States)
Yuri A. Eremin, Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 4449:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
Angela Duparre; Bhanwar Singh, Editor(s)

© SPIE. Terms of Use
Back to Top