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Proceedings Paper

Use of light scatter signals to identify particle material
Author(s): John C. Stover; Vladimir I. Ivakhnenko; Yuri A. Eremin
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Paper Abstract

Defect detection and counting have been used to qualify silicon wafers for use in device production for several years. Defect sizing is attempted by comparing scatter signals, used for detection, to signals produced from spherical polystyrene latex spheres of known diameter. Real particles are neither spherical nor made of plastic, and scatter differently. This paper addresses the issue of spherical particle material identification through the measurement of scatter signals into several directions. The basic idea is that the average diameter and material constants comprising the complex index amount to three unknowns. The question is whether they can be estimated from three independent measurements. The results presented here are quite positive. The issue of particle shape is left for another paper.

Paper Details

Date Published: 10 December 2001
PDF: 9 pages
Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); doi: 10.1117/12.450086
Show Author Affiliations
John C. Stover, ADE Corp. (United States)
Vladimir I. Ivakhnenko, ADE Corp. (United States)
Yuri A. Eremin, Moscow State Univ. (Russia)


Published in SPIE Proceedings Vol. 4449:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
Angela Duparre; Bhanwar Singh, Editor(s)

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