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Proceedings Paper

Standardization of the measurement of laser-induced damage threshold and material absorption
Author(s): Roger M. Wood
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Paper Abstract

Attempts have been made over a number of years to scale laser induced damage threshold measurements across the boundaries of pulse length, spot size, wavelength and material differences. These efforts have been hampered by the absence of pertinent data, made under identical conditions, on the threshold results that have been published. The new ISO 11254-1, -2, -3 Standards for the Measurement of Laser Induced Damage and ISO11551 for Absorption have now been finalised and if accepted by the scientific fraternity will enable meaningful comparative results to be published. This paper will discuss the similarities and differences between 1- on- 1, S- on- 1 and R- on- 1, laser induced damage threshold, LIDT, measurements and damage assurance methodology and will show how differences in absorption can effect both the damage values and the damage morphology.

Paper Details

Date Published: 10 December 2001
PDF: 12 pages
Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); doi: 10.1117/12.450082
Show Author Affiliations
Roger M. Wood, COSOLAS Ltd. (United Kingdom)


Published in SPIE Proceedings Vol. 4449:
Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II
Angela Duparre; Bhanwar Singh, Editor(s)

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