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Proceedings Paper

Debris-free soft x-ray source with gas-puff target
Author(s): Qiliang Ni; Bo Chen; Yan Gong; Jianlin Cao; Jingquan Lin; Hongyan Lee
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Paper Abstract

We have been developing a debris-free laser plasma light source with a gas-puff target system whose nozzle is driven by a piezoelectric crystal membrane. The gas-puff target system can utilize gases such as CO2, O2 or some gas mixture according to different experiments. Therefore, in comparison with soft X-ray source using a metal target, after continuously several-hour laser interaction with gas from the gas-puff target system, no evidences show that the light source can produce debris. The debris-free soft X-ray source is prepared for soft X-ray projection lithography research at State Key Laboratory of Applied Optics. Strong emission from CO2, O2 and Kr plasma is observed.

Paper Details

Date Published: 6 December 2001
PDF: 4 pages
Proc. SPIE 4502, Advances in Laboratory-based X-Ray Sources and Optics II, (6 December 2001); doi: 10.1117/12.449859
Show Author Affiliations
Qiliang Ni, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Bo Chen, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Yan Gong, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Jianlin Cao, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Jingquan Lin, Changchun Institute of Optics, Fine Mechanics and Physics (China)
Hongyan Lee, Changchun Institute of Optics, Fine Mechanics and Physics (China)


Published in SPIE Proceedings Vol. 4502:
Advances in Laboratory-based X-Ray Sources and Optics II
Ali M. Khounsary; Carolyn A. MacDonald, Editor(s)

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