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Proceedings Paper

Multipoint diffraction interferometry for 3D profilometry
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Paper Abstract

We present a method of 3-D profile measurement to obtain the xyz-coordinates of complex surfaces based on multipoint diffraction interferometry. This method uses multiple sets of diffraction light sources, each of which is made of two single-mode optical fibers emitting spherical wavefronts. Fringe patterns generated by the interference of two spherical wavefronts are illuminated on the target surface, whose phases are precisely determined by using phase-shifting technique. Finally, measured phase information is directly related to the xyz-coordinates of the target surface utilizing principles of multilateration.

Paper Details

Date Published: 26 November 2001
PDF: 8 pages
Proc. SPIE 4448, Optical Diagnostics for Fluids, Solids, and Combustion, (26 November 2001); doi: 10.1117/12.449375
Show Author Affiliations
Seung-Woo Kim, Korea Advanced Institute of Science and Technology (South Korea)
Byoung-Chang Kim, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 4448:
Optical Diagnostics for Fluids, Solids, and Combustion
Carolyn R. Mercer; Soyoung Stephen Cha; Gongxin Shen, Editor(s)

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