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Proceedings Paper

Phase-shifting AFM moire method
Author(s): Anand Krishna Asundi; Huimin Xie; Jin Yu; Zhaowei Zhong
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Paper Abstract

In this paper, a phase shifting technique for atomic force microscope (AFM) scanning moire method is proposed. The phase shifting is realized in four steps from 0 to 2π by a piezo-scanner in AFM. The measurement method and experimental techniques are described in detail. For demonstration, this method is applied to determine the phase distribution in AFM moire of a 1200 lines/mm holographic grating used to measure thermal deformation in a QFP electronic package.

Paper Details

Date Published: 26 November 2001
PDF: 9 pages
Proc. SPIE 4448, Optical Diagnostics for Fluids, Solids, and Combustion, (26 November 2001); doi: 10.1117/12.449366
Show Author Affiliations
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)
Huimin Xie, Nanyang Technological Univ. (Singapore)
Jin Yu, Nanyang Technological Univ. (Singapore)
Zhaowei Zhong, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4448:
Optical Diagnostics for Fluids, Solids, and Combustion
Carolyn R. Mercer; Soyoung Stephen Cha; Gongxin Shen, Editor(s)

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