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Proceedings Paper

Integrated circuit for SAW and MEMS sensors
Author(s): Wolf-Joachim Fischer; Peter Koenig; Matthias Ploetner; Rudiger Hermann; Helmut Stab
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Paper Abstract

The sensor processor circuit has been developed for hand-held devices used in industrial and environmental applications, such as on-line process monitoring. Thereby devices with SAW sensors or MEMS resonators will benefit from this processor especially. Up to 8 sensors can be connected to the circuit as multisensors or sensor arrays. Two sensor processors SP1 and SP2 for different applications are presented in this paper. The SP-1 chip has a PCMCIA interface which can be used for the program and data transfer. SAW sensors which are working in the frequency range from 80 MHz to 160 MHz can be connected to the processor directly. It is possible to use the new SP-2 chip fabricated in a 0.5(mu) CMOS process for SAW devices with a maximum frequency of 600 MHz. An on-chip analog-digital-converter (ADC) and 6 PWM modules support the development of high-miniaturized intelligent sensor systems We have developed a multi-SAW sensor system with this ASIC that manages the requirements on control as well as signal generation and storage and provides an interface to the PC and electronic devices on the board. Its low power consumption and its PCMCIA plug fulfil the requirements of small size and mobility. For this application sensors have been developed to detect hazardous gases in ambient air. Sensors with differently modified copper-phthalocyanine films are capable of detecting NO2 and O3, whereas those with a hyperbranched polyester film respond to NH3.

Paper Details

Date Published: 21 November 2001
PDF: 9 pages
Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); doi: 10.1117/12.449163
Show Author Affiliations
Wolf-Joachim Fischer, Technische Univ. Dresden (Germany)
Peter Koenig, Fraunhofer Institut fuer Mikroelektronische Schaltungen und Systeme (Germany)
Matthias Ploetner, Technische Univ. Dresden (Germany)
Rudiger Hermann, Fraunhofer Institut fuer Mikroelektronische Schaltungen und Systeme (Germany)
Helmut Stab, Technische Univ. Dresden (Germany)

Published in SPIE Proceedings Vol. 4591:
Electronics and Structures for MEMS II
Neil W. Bergmann; Derek Abbott; Alex Hariz; Vijay K. Varadan, Editor(s)

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