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Proceedings Paper

Characterization of a CMOS humidity sensor using different polyimides as sensing films
Author(s): Yanyan Qiu; Carlos Azeredo-Leme; Luis Alcacer; Jose E. Franca
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Paper Abstract

This paper describes the characterization of a CMOS humidity sensor using three Dupont polyimides, PI2555, PI2610, and PI2723 as sensing films. The sensing principle of the sensor is the dielectric constant change of deposited sensing films due to absorption/adsorption of water. The humidity sensing film is deposited by a post-processing step after the standard CMOS fabrication. The on-chip calibration circuit is based on a switched-capacitor front-end, featuring high linearity, insensitivity to temperature, as well as low power consumption. The measured results show that the coating film thickness incluences the sensor response speed, but has no influence on the sensor transfer function, thanks to the on-chip calibration circuit. Sensor coated with PI2555 has better performance then other two regarding to sensitivity, response speed, and stability.

Paper Details

Date Published: 21 November 2001
PDF: 6 pages
Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); doi: 10.1117/12.449161
Show Author Affiliations
Yanyan Qiu, Univ. Tecnica de Lisboa (Portugal)
Carlos Azeredo-Leme, Univ. Tecnica de Lisboa (Portugal)
Luis Alcacer, Univ. Tecnica de Lisboa (Portugal)
Jose E. Franca, Univ. Tecnica de Lisboa (Portugal)

Published in SPIE Proceedings Vol. 4591:
Electronics and Structures for MEMS II
Neil W. Bergmann; Derek Abbott; Alex Hariz; Vijay K. Varadan, Editor(s)

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