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Proceedings Paper

Influence of initial curvature on micromachined thermal bimorph actuation
Author(s): Chengpeng Hsu; Wensyang Hsu
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Paper Abstract

While the micro bimorph structures are fabricated with enough initial curvatures or so-called geometrical imperfections, structural instability may occur to result in snap-through behaviors and exhibit large deflection strokes. The bimorph structures with various initial deflections ratios and various heating area ratios are simulated and fabricated to predict the stable and unstable regions of the curved bimorph structures with clamped boundary condition. Four major types of load-deflection curves are described and discussed. Testing results and some observations are reported.

Paper Details

Date Published: 21 November 2001
PDF: 8 pages
Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); doi: 10.1117/12.449160
Show Author Affiliations
Chengpeng Hsu, National Chiao Tung Univ. (Taiwan)
Wensyang Hsu, National Chiao Tung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 4591:
Electronics and Structures for MEMS II
Neil W. Bergmann; Derek Abbott; Alex Hariz; Vijay K. Varadan, Editor(s)

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