Share Email Print

Proceedings Paper

Thin film characterization using terahertz differential time-domain spectroscopy and double modulation
Author(s): Samuel P. Mickan; Kwang-Su Lee; Toh-Ming Lu; Edward Barnat; Jesper Munch; Derek Abbott; Xi-Cheng Zhang
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Characterizing the optical and dielectric properties of thin films in the GHz to THz range is critical for the development of new technologies in integrated circuitry, photonics systems and micro-opto-electro-mechanical systems (MOEMS). Terahertz differential time-domain spectroscopy (DTDS) is a new technique that uses pulsed terahertz (THz) radiation to detect phase changes of less than 0.6 femtoseconds (fs) and absorption changes corresponding to several molecular monolayers. This paper shows how DTDS can be combined with double modulation in the pump-probe system to improve sensitivity by an order of magnitude. The technique is experimentally verified using 1 μm thick samples of silicon dioxide on silicon.

Paper Details

Date Published: 21 November 2001
PDF: 13 pages
Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); doi: 10.1117/12.449149
Show Author Affiliations
Samuel P. Mickan, Rensselaer Polytechnic Institute and Adelaide Univ. (Australia)
Kwang-Su Lee, Rensselaer Polytechnic Institute (United States)
Toh-Ming Lu, Rensselaer Polytechnic Institute (United States)
Edward Barnat, Rensselaer Polytechnic Institute (United States)
Jesper Munch, Adelaide Univ. (Australia)
Derek Abbott, Adelaide Univ. (Australia)
Xi-Cheng Zhang, Rensselaer Polytechnic Institute (United States)

Published in SPIE Proceedings Vol. 4591:
Electronics and Structures for MEMS II
Neil W. Bergmann; Derek Abbott; Alex Hariz; Vijay K. Varadan, Editor(s)

© SPIE. Terms of Use
Back to Top