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Proceedings Paper

Mass sensitivity of layered shear-horizontal surface acoustic wave devices for sensing applications
Author(s): Kourosh Kalantar-Zadeh; Adrian Trinchi; Wojtek Wlodarski; Anthony Holland; Kosmas Galatsis
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Paper Abstract

Layered Surface Acoustic Wave (SAW) devices that allow the propagation of Love mode acoustic waves will be studied in this paper. In these devices, the substrate allows the propagation of Surface Skimming Bulks Waves (SSBWs). By depositing layers, that the speed of Shear Horizontal (SH) acoustic wave propagation is less than that of the substrate, the propagation mode transforms to Love mode. Love mode devices which will be studied in this paper, have SiO2 and ZnO acoustic guiding layers. As Love mode of propagation has no movement of particles component normal to the active sensor surface, they can be employed for the sensing applications in the liquid media.

Paper Details

Date Published: 21 November 2001
PDF: 12 pages
Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); doi: 10.1117/12.449140
Show Author Affiliations
Kourosh Kalantar-Zadeh, Royal Melbourne Institute of Technology (Australia)
Adrian Trinchi, Royal Melbourne Institute of Technology (Australia)
Wojtek Wlodarski, Royal Melbourne Institute of Technology (Australia)
Anthony Holland, Royal Melbourne Institute of Technology (Australia)
Kosmas Galatsis, Royal Melbourne Institute of Technology (Australia)


Published in SPIE Proceedings Vol. 4591:
Electronics and Structures for MEMS II
Neil W. Bergmann; Derek Abbott; Alex Hariz; Vijay K. Varadan, Editor(s)

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