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Proceedings Paper

Copper microcoil arrays for the actuation of optical matrix microswitches
Author(s): Lionel Houlet; Gilbert Reyne; Tetsuhiko Iizuka; Tarik Bourouina; Elizabeth-Dufour Gergam; Hiroyuki Fujita
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Paper Abstract

Copper micro-coil arrays have been designed and realized by electroplating for the actuation of arrays of optical matrix micro-switches. The good operation of the micro-switches needs large force that is well fulfilled by the electromagnetic actuation of copper micro-coils. The electromagnetic behavior of the actuator has been examined using the simulator FLUX2DTM and an optimized configuration of ferromagnetic materials was determined. Arrays of micro-coils with high aspect ratio have been achieved with the use of SU8 resin mould. The diameters of micro-coils range from 0.5 millimeters to 4 millimeters with thickness of about 30 micrometers and few tens of turns. Electric measurements have been done in order to characterize the micro-coils.

Paper Details

Date Published: 21 November 2001
PDF: 6 pages
Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448997
Show Author Affiliations
Lionel Houlet, LIMMS/CNRS/Univ. of Tokyo (Japan)
Gilbert Reyne, LIMMS/CNRS/Univ. of Tokyo (Japan)
Tetsuhiko Iizuka, Univ. of Tokyo (Japan)
Tarik Bourouina, Ctr. Scientifique d'Orsay (Japan)
Elizabeth-Dufour Gergam, Ctr. Scientifique d'Orsay (France)
Hiroyuki Fujita, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 4592:
Device and Process Technologies for MEMS and Microelectronics II
Jung-Chih Chiao; Lorenzo Faraone; H. Barry Harrison; Andrei M. Shkel, Editor(s)

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