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Proceedings Paper

Optical switch array based on microforming process
Author(s): Yusuke Hashiura; Tsuyoshi Ikehara; Akiko Kitajima; Hiroshi Goto; Ryutaro Maeda
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Paper Abstract

With increasing data traffics, the importance of the switches is increasing and further cost reduction will be expected. One of the most effective efforts to decrease the cost is introduction of forming technology for micro parts fabrication. The materials of interest are polymer materials for their low cost. In this study, the prototype is presented of the optical switch based on microforming process of polymer materials, and basic characteristics of micro hot embossing are presented. In the present switch, the pop up type micro mirror array on the moving diaphragm fabricated by microforming is actuated by electrostatic force and the optimum electrodes structure of the switch is analyzed by computer simulation to fulfill the large deformation and stable switching. Total system fabrication process including optical fiber alignment and device packaging is also presented. Finally hot embossing of polymer materials are characterized experimentally.

Paper Details

Date Published: 21 November 2001
PDF: 8 pages
Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448996
Show Author Affiliations
Yusuke Hashiura, National Institute of Advanced Industrial Science and Technology (Japan)
Tsuyoshi Ikehara, National Institute of Advanced Industrial Science and Technology (Japan)
Akiko Kitajima, National Institute of Advanced Industrial Science and Technology (Japan)
Hiroshi Goto, Hitachi, Ltd. (Japan)
Ryutaro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 4592:
Device and Process Technologies for MEMS and Microelectronics II
Jung-Chih Chiao; Lorenzo Faraone; H. Barry Harrison; Andrei M. Shkel, Editor(s)

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