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Proceedings Paper

Fabrication of integrated micromachined polymer magnet
Author(s): Olarn Rojanapornpun; Chee Yee Kwok
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Paper Abstract

In this paper, the technique for fabricating integrated polymer magnet suitable for microelectromechanical system (MEMS) is discussed. Spin coating and screen printing techniques have been reported by other researchers, however, obtaining small feature sizes and good alignment accuracy are difficult. Furthermore, from our experiments, spin coating of composite material results in unacceptable surface roughness and it is difficult to obtain high powder loading. The paper discusses the technique of implementing template printing where the sacricial layer is used to form the template for polymer magnet structure. Instead of dispersing magnetic powder into the matrix material, magnetic powder is filled into template follow by embedding of matrix material. This technique has the advantages of improved alignment accuracy, minimum structure size achievable, and high magnetic powder loading. Strontium ferrite/polyimide composite structure has been fabricated. Integrated polymer magnet as small as 100 micrometers in diameter has been achieved. Alignment is only limited by alignment of the template using mask aligner used by typical photolithography step. Volume loading of 65%, Residual magnetic flux density Br of 0:21 T, Intrinsic coercivity Hci of 325 kA/m, and maximum energy product (BH)max of 8145 T A/m were achieved.

Paper Details

Date Published: 21 November 2001
PDF: 8 pages
Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448986
Show Author Affiliations
Olarn Rojanapornpun, Univ. of New South Wales (Australia)
Chee Yee Kwok, Univ. of New South Wales (Australia)

Published in SPIE Proceedings Vol. 4592:
Device and Process Technologies for MEMS and Microelectronics II
Jung-Chih Chiao; Lorenzo Faraone; H. Barry Harrison; Andrei M. Shkel, Editor(s)

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