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Proceedings Paper

Materials and reliability issues in MEMS and microsystems
Author(s): Aristos Christou
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Paper Abstract

MEMs are basically sensors and actuators in a harsh environment or strains exceeding 102 and strain rates approaching shock deformation conditions. The reliability concerns are electronic, optical and micro-mechanical. Surface morphology of sensors and actuators becomes critical and the investigation presents results on diamond like films developed for resolving tribology related problems in MEMs rotating surfaces. Other MEMs results on surface passivation are reviewed.

Paper Details

Date Published: 21 November 2001
PDF: 8 pages
Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448984
Show Author Affiliations
Aristos Christou, Univ. of Maryland/College Park (United States)

Published in SPIE Proceedings Vol. 4592:
Device and Process Technologies for MEMS and Microelectronics II
Jung-Chih Chiao; Lorenzo Faraone; H. Barry Harrison; Andrei M. Shkel, Editor(s)

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