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Proceedings Paper

Antiresonant reflecting optical waveguide surface plasmon resonance sensors
Author(s): Yang-Tung Huang; Wei-Zung Chang; Shih-Hsin Hsu; Chun-Ho Chen; Jou-Chien Chen
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Paper Abstract

An ARROW-B (antiresonant reflecting optical waveguide, type B) surface plasmon resonance (SPR) sensor operating in aqueous environment is proposed. The characteristics, design, and optimization of the Au-coated ARROW-B SPR sensor are discussed. The operating range of the sensor can be shifted by adding a dielectric overlay. The detectable changes of the refractive index down to the order of 10-5 can be achieved. The design of an ARROW SPR sensor on Si substrates for detecting hydrogen molecules with palladium as the metal film will also be discussed.

Paper Details

Date Published: 21 November 2001
PDF: 8 pages
Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448981
Show Author Affiliations
Yang-Tung Huang, National Chiao Tung Univ. (Taiwan)
Wei-Zung Chang, National Chiao Tung Univ. (Taiwan)
Shih-Hsin Hsu, National Chiao Tung Univ. (Taiwan)
Chun-Ho Chen, National Chiao Tung Univ. (Taiwan)
Jou-Chien Chen, National Chiao Tung Univ. (Taiwan)

Published in SPIE Proceedings Vol. 4592:
Device and Process Technologies for MEMS and Microelectronics II
Jung-Chih Chiao; Lorenzo Faraone; H. Barry Harrison; Andrei M. Shkel, Editor(s)

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