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Proceedings Paper

Si micromachining for optics: optical components and sensors
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Paper Abstract

Si micromachining is a promising technique for fabricating several optical components. It is also indispensable for the low-cost assembly. We studied the Si micromachining for fabricating optical sensors and components. The Si crystalline etching was studied for generating the mirror surface smooth enough to be used in micro-laser-cavity. The etched Si mirror surface was transferred to the polymer replica by molding. Laser oscillation was demonstrated with the replicated solid-dye-micro-laser. The optical transmission structures were also fabricated by etching through Si wafer with the deep RIE, and used for new optical components. The integrated pinhole filter, position sensor and optical encoder were proposed. Integration of optical components with micro-actuator makes the optical system variable. The three-dimensional structures with actuators were fabricated by the new lithographic technique using spray resist coater. A tunable filter for telecommunication and a laser beam scanner with micro-mirror were fabricated.

Paper Details

Date Published: 21 November 2001
PDF: 9 pages
Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448978
Show Author Affiliations
Kazuhiro Hane, Tohoku Univ. (Japan)
Minoru Sasaki, Tohoku Univ. (Japan)
Jong Hyeong Song, Tohoku Univ. (Japan)


Published in SPIE Proceedings Vol. 4592:
Device and Process Technologies for MEMS and Microelectronics II
Jung-Chih Chiao; Lorenzo Faraone; H. Barry Harrison; Andrei M. Shkel, Editor(s)

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