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Proceedings Paper

Electromagnetic remote control and downscaling advantages and examples for MOEMS
Author(s): Gilbert Reyne; Lionel Houlet; Yoshifumi Takahashi; Tarik Bourouina; Hiroyuki Fujita
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Paper Abstract

Electromagnetic actuation is applied to MOEMS for industrial applications requiring large and long-range forces. Advantages and drawbacks are outlined while down scaling laws are discussed. Technological improvements and new available materials bring to much smaller dimensions, the limit between Electromagnetism and Electrostatics. Remote control and bi-stability are unique characteristics of electromagnetic actuation. The importance of remote control is stressed so as to allow easy tests and optimization with no technological compatibility problem. These advantages are illustrated on three different electromagnetic MOEMS, developed in LIMMS, a Franco-Japanese research Laboratory based in Tokyo. The first is a resonant 1D magnetic scanner, the second is a magnetic bi-stable matrix array of optical micro-switches and the last is a remarkable application of the properties of thick Magnetostrictive thin layers to a 2D scanner.

Paper Details

Date Published: 21 November 2001
PDF: 11 pages
Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); doi: 10.1117/12.448967
Show Author Affiliations
Gilbert Reyne, Institute National Polytechnique de Grenoble and LIMMS/CNRS/Univ. of Tokyo (Japan)
Lionel Houlet, LIMMS/CNRS/Univ. of Tokyo (Japan)
Yoshifumi Takahashi, LIMMS/CNRS/Univ. of Tokyo and ANRITSU Corp. (Japan)
Tarik Bourouina, Univ. of Tokyo and Institut d'Electronique Fondamentale (Japan)
Hiroyuki Fujita, LIMMS/CNRS/Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 4592:
Device and Process Technologies for MEMS and Microelectronics II
Jung-Chih Chiao; Lorenzo Faraone; H. Barry Harrison; Andrei M. Shkel, Editor(s)

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